Georgia Tech Facilities

Marcus Nanotechnology Building

Nanotechnology Research Center (NRC)

  • 8,500 sf cleanroom including a 4 nm JEOL 9300FS e-beam lithographer.
  • 2in SiC wafers graphitization furnace

Physics NanoFab Facility

  • Prototype e-beam lithography patterning (JEOL JSM-5900 SEM), wafer-processing fume hood with spinner.

Center for Nanostructure Characterization

  • Scanning and transmission electron microscopes with materials analysis.
  • Hitachi HF-2000, JEOL 4000EX, JEOL 100CX II, Hitachi S800, LEO 1530

Graphene Video Highlights

Graphene Takes Worldwide Spotlight