Marcus Nanotechnology Building
Nanotechnology Research Center (NRC)
- 8,500 sf cleanroom including a 4 nm JEOL 9300FS e-beam lithographer.
- 2in SiC wafers graphitization furnace
Physics NanoFab Facility
- Prototype e-beam lithography patterning (JEOL JSM-5900 SEM), wafer-processing fume hood with spinner.
Center for Nanostructure Characterization
- Scanning and transmission electron microscopes with materials analysis.
- Hitachi HF-2000, JEOL 4000EX, JEOL 100CX II, Hitachi S800, LEO 1530